10th International Conference on Spectroscopic Ellipsometry

June 8-13, 2025, in Boulder, CO, USA

Important Dates

2025/02/15

Final Deadline for
Abstract Submissions
2025/02/15

Final Deadline for
Award Nominations
2025/??/??

Deadline for Early
Conference Registration
2025/??/??

Deadline for
Hotel Discounts

Diamond Sponsors

Welcome Message

You are cordially invited to the 10^th International Conference on Spectroscopic Ellipsometry, ICSE-10, to be held 08-13 June 2025 at the University of Colorado, Boulder, Colorado.

The ICSE Conferences are the premier gatherings of experts and non-experts alike to share knowledge and learn about the latest advances and applications of spectroscopic ellipsometry and related techniques. The meeting consists of a wide variety of tutorials, invited talks, presentations, and posters that cover all aspects of the field, and provides ample opportunities for networking and discussion. The equipment display will cover the latest not only in ellipsometry but also in other methods of learning about surfaces, interfaces, thin films, nanostructures, and bulk materials under both static and dynamic conditions through the use of polarized light.

The meeting will be held on the campus of the University of Colorado at Boulder. The campus is in the foothills of the Rocky Mountains, and is about an hour away from the Denver Airport by public transportation. Boulder is known for its blend of urban and outdoor activities, including a vibrant downtown and talented brewers and chefs. The pedestrian Pearl Street Mall includes numerous art galleries, cafes, restaurants, and boutiques. In addition to spectacular scenery, Boulder provides a wealth of recreational opportunities including biking and hiking. The Rocky Mountain National Park is about 1 ½ hours away.

Organizing Committee

Mathias Schubert

University of Nebraska-Lincoln (USA) & Lund University (Sweden)

David E. Aspnes

North Carolina State University (USA)

Alain C. Diebold

CNSE, University at Albany, SUNY (USA)

Eva Franke-Schubert

University of Nebraska-Lincoln (USA)
Workforce and Sponsoring Chair

Markus Raschke

University of Colorado at Boulder (USA)
Local Chair

Years

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Manuscript Submission

Gold Sponsors

Latest Announcements

Fifth Announcement

January 28, 2025
The international community of ellipsometry enthusiasts is set to meet at the 10th International Conference on Spectroscopic Ellipsometry (ICSE-10), scheduled for June 8-13, 2025, in Boulder, Colorado. This premier event serves as a platform for the
- exchange of scientific and technological knowledge and recent advancements.
- collaboration among professionals from academia, government, and industry.
- development of an inclusive workforce for the future.
ICSE-10 brings together a diverse group of experienced scientists and leaders, early career professionals, postdocs, plus graduate and undergraduate students—all in a breathtaking surrounding at the foothills of the Rocky Mountains.
As Conference Registration is fast approaching, registration fees are currently anticipated at a rate of $900 for regular and $500 for student attendees, including all activities at no extra costs to participants. Please start preparing your arrangements for travel and accommodation. A block of reduced rates in Hotels is currently being negotiated. A budget of low-cost beds in Campus Lodging may subsidize selected early-career and student attendees.

The comprehensive Technical Program will include a broad range of aspects in the field of ellipsometry and polarimetry, as well as related applications utilizing the polarization properties of light. Topics cover theory, instrumentation, and applications across physics, chemistry, material science, and life sciences, as well as engineering and metrology.

Sunday, complimentary Tutorials will kick-off ICSE-10 with outstanding scientists teaching introductory and advanced aspects in emerging areas:

Tatiana Novikova (Tutorial):
Imaging Mueller Polarimetry: From Metrology to Biomedicine

Mathias Schubert (Tutorial):
The Eigenpolarization Model: A Physics Approach to Render the Susceptibility Tensors of Anisotropic Materials

Nikolas Podraza (Tutorial):
Data Analysis: Turning Bad Models into Good Results

Erwin Kessels (Tutorial):
In-Situ Spectroscopic Ellipsometry during Atomic Layer Deposition and Related Processes

Frank Urban (Tutorial):
Artificial Intelligence and Machine Learning in Ellipsometry

An Evening Reception will welcome our community from around the world in the warm atmosphere of the historic Chautauqua Dining Hall at the base of Boulder’s iconic Flatirons.

Monday through Friday, Oral and Poster Sessions will take place in the Glenn Miller Ballroom, including an excellent lineup of Keynote & Invited Speakers:

Steven M. George (Keynote):
In-Situ Spectroscopic Ellipsometry Studies of Selective Atomic Layer Deposition and Etch Processes

Alain Diebold (Keynote):
Mueller-Matrix Spectroscopic Ellipsometry based Scatterometry: Optical Dimensional and Shape Analysis

Yu-Xiang Zheng (Keynote):
Half a Century of Spectroscopic Ellipsometry in China

Shiyuan Liu (Keynote):
Advanced Mueller-Matrix Ellipsometry: Instrumentation and Emerging Applications

Vanya Darakchieva (Keynote):
THz Spectroscopic Ellipsometry and Its Future

Stefan Zollner (Keynote):
Accurate Measurements of Optical Constants using Temperature-Dependent Ellipsometry and Comparison with k.p Theory

David Aspnes (Invited):
Removing Noise from Spectra: The Next 100 Years.

Shirly Espinoza (Invited):
Approaching Ultrafast Phenomena in Materials by Time-Resolved Ellipsometry

Kurt Hingerl (Invited):
Can Imaging Ellipsometry Beat the Diffraction Limit?

Ufuk Kilic (Invited):
Metamaterial Platforms: Harnessing Spectrally Controllable Strong Chiroptical Activity and Beyond

Taeyong Jo (Invited):
New Spectroscopic Ellipsometry Instrumentation for Application to the Semiconductor Industry

Peter Petrik (Invited):
Low-Dimensional, Combinatorial and Periodic Structures for Sensing Catalysis – Characterization of Interface Process by In-Situ Spectroscopic Ellipsometry

Angelo Pierangelo (Invited):
Fast, High-Resolution Integrated Multispectral Mueller Ellipsometry for In-Vivo Biomedical Diagnostics

Viktor Rindert (Invited):
Exploring Paramagnetic Resonance through Mueller-Matrix Ellipsometry

Chris Sturm (Invited):
Electromagnetic Waves in Optically Anisotropic Media: Presence and Propagation of Singular States

A special session will be dedicated to aspects of Workforce Development for early-career professionals and students alike:

Andy Antonelli (Keynote):
Have Polarizer – Will Travel: The Need for Ellipsometry Expertise in Industry

Shari Liss (Keynote):
Workforce Development for Semiconductor Industry

Refreshments will be served during session breaks and during poster sessions. Lunch will be served Sunday through Thursday.

Please remember to Submit Your Abstract by 11:59 PM Mountain Time on January 31, 2025.

Wednesday, an Excursion to the Georgetown Loop Railroad will bring all attendees aboard an original 19^th-century train steaming along old gold miners tracks and leaving fond memories for a lifetime. Afterwards, the Conference Dinner will offer an authentic American experience in the Byron R. White Club with spectacular views over Folsom Field, the home stadium of the Colorado Buffaloes football team.
On Friday, the Awards ceremony will honor
- a young scientist for exceptional contributions with the Paul Drude Award.
- a senior community member for pioneering, lifetime achievements with the Hans Mueller Memorial Award and Lecture.
- an individual, research group, company, or institution for outstanding innovation and creativity with the Innovation and Creativity Award.
- students for the best oral presentation and the best poster with respective Student Awards.
Please remember to Submit Award Nominations no later than February 1, 2025.
ICSE-10 will also feature a simultaneous, week-long Industry Exhibition in the Aspen Rooms next to the main venue. The organizers and attendees are grateful for a growing List of Sponsors that make this event possible.

Please refer to the Prospectus for sponsorship opportunities.

The organizing Committees look forward to seeing you in Boulder, Colorado, soon!
Fourth Announcement

June 14, 2024

Dear colleagues,

The ICSE-10 official website is now online.

Stay tuned for important updates about the abstract submission timeline, conference schedule, award nominations, and speaker invitations.

At this time we anticipate ICSE-10 to be a fully in-person meeting.

Please encourage your colleagues and collaborators interested in participating to subscribe to our website icse10.ellipsometry.us

Please direct questions and inquiries to icse10@ellipsometry.us

We look forward to welcoming you to Boulder, Colorado June 8-13 2025.

The ICSE-10 organizers

Silver Sponsors

Event Venue

ICSE-10 will be held at the University of Colorado’s University Memorial Center (UMC) in Boulder, Colorado, USA. Boulder is located in the foothills of the Rocky Mountains, less than one-hour drive from Denver International Airport. The main conference events such as tutorials, oral presentations, and poster sessions will take place in the Glenn Miller Ballroom. A simultaneous industry exhibition will take place in the adjacent Aspen Rooms.

Attendance Support

Assistance may be provided to subsidize registration fees, travel, or accommodation for selected students and early-career professionals.

Tentative Scope & Topics

The comprehensive Technical Program will include a broad range of aspects in the field of ellipsometry and polarimetry, as well as related applications utilizing the polarization properties of light as a diagnostic of surfaces, interfaces, thin films, nanostructures, and bulk materials.

Topics cover theory, instrumentation, and applications across physics, chemistry, material science, and life sciences, as well as engineering and metrology.

Theory

Artificial Intelligence and Machine Learning
Data Analysis
Fast data processing
Optical Modeling (Finite Element, ab-initio, …)
Subwavelength Structure Analysis and Modeling
Time-dependence

Instrumentation

Imaging Ellipsometry and High-Resolution
Metrology
Mueller-Matrix Spectroscopy
New Developments
Nonlinear and Time-Resolved Ellipsometry
THz and Extreme Ultraviolet

Applications

Advanced Semiconductor Metrology
Anisotropy and Anisotropic Materials
Artificial Intelligence and Machine Learning
Bio- and Life-Sciences
Correlated Systems
Chemistry and Biochemistry
Ferroelectrics, Piezoelectrics, Ferromagnetics, Antiferromagnetics, Multiferroics
High-Entropy Materials
Imaging
Interfaces
Liquid Crystals
Mueller-Matrix Polarimetry and Scatterometry
Nanomaterials
Optical Properties
Organics and Polymers
Photovoltaics and Renewable Energy Materials
Quantum Materials and Materials for Quantum Applications
Real-time Process Monitoring and Control
Two-Dimensional Systems

From Monday, June 9, through Friday, June 13, 2025, Oral and Poster Sessions will take place in the Glenn Miller Ballroom, including an excellent lineup of Keynote & Invited Speakers.

Keynote Speakers

Steven M. George

University of Colorado Boulder (USA)

Keynote Title Coming Soon

Alain Diebold

University at Albany, SUNY (USA)

Mueller-Matrix Spectroscopic Ellipsometry based Scatterometry: Optical Dimensional and Shape Analysis

Yu-Xiang Zheng

Fudan University (China)

Half a Century of Spectroscopic Ellipsometry in China

Shiyuan Liu

Huazhong University of Science and Technology (China)

Advanced Mueller-Matrix Ellipsometry: Instrumentation and Emerging Applications

Vanya Darakchieva

Lund University (Sweden)

THz Spectroscopic Ellipsometry and Its Future

Stefan Zollner

New Mexico State University (USA)

Accurate Measurements of Optical Constants using Temperature-Dependent Ellipsometry and Comparison with k.p Theory

Andy Antonelli

ONTO Innovation (USA)

Have Polarizer – Will Travel: The Need for Ellipsometry Expertise in Industry

Shari Liss

Semiconductor Foundation (USA)

Workforce Development for Semiconductor Industry

Invited Speakers

David Aspnes

North Carolina State University (USA)

Removing Noise from Spectra: The Next 100 Years.

Shirly Espinoza

ELI Beamlines (Czech Republic)

Approaching Ultrafast Phenomena in Materials by Time-Resolved Ellipsometry

Kurt Hingerl

Johannes Kepler University Linz (Austria)

Can Imaging Ellipsometry Beat the Diffraction Limit?

Ufuk Kilic

University of Nebraska-Lincoln (USA)

Metamaterial Platforms: Harnessing Spectrally Controllable Strong Chiroptical Activity and Beyond

Taeyong Jo

Samsung (South Korea)

New Spectroscopic Ellipsometry Instrumentation for Application to the Semiconductor Industry

Peter Petrik

University of Debrecen (Hungary)

Low-Dimensional, Combinatorial and Periodic Structures for Sensing Catalysis – Characterization of Interface Process by In-Situ Spectroscopic Ellipsometry

Angelo Pierangelo

Institut Polytechnique De Paris (France)

Fast, High-Resolution Integrated Multispectral Mueller Ellipsometry for In-Vivo Biomedical Diagnostics

Viktor Rindert

Lund University (Sweden)

Exploring Paramagnetic Resonance through Mueller-Matrix Ellipsometry

Chris Sturm

Universität Leipzig (Germany)

Electromagnetic Waves in Optically Anisotropic Media: Presence and Propagation of Singular States

Bronze Sponsors

Friends of ICSE-10

Social Events

Social Events will include an Evening Reception, Excursion, Conference Dinner, and Catering during Breaks.

Awards

On Friday, June 13, 2025, the Awards ceremony will recognize excellent achievements at different levels by honoring

a young scientist for exceptional contributions with the Paul Drude Award.
a senior community member for pioneering, lifetime achievements with the Hans Mueller Memorial Award and Lecture.
an individual, research group, company, or institution for outstanding innovation and creativity with the Innovation and Creativity Award.
students for the best oral presentation and the best poster with respective Student Awards.

Industry Exhibition

From Monday, June 9, through Thursday, June 12, 2025, ICSE-10 will feature a simultaneous Industry Exhibition. The exhibition will be located in the Aspen Rooms next to the Glenn Miller Ballroom at the main conference venue.