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Logo of the Platinum Sponsor: University of Nebraska-Lincoln, Department of Electrical and Computer Engineering
Logo of the U.S. National Science Foundation
  • Welcome Message


    You are cordially invited to the 10th International Conference on Spectroscopic Ellipsometry, ICSE-10, to be held 08-13 June 2025 at the University of Colorado, Boulder, Colorado. 

    The ICSE Conferences are the premier gatherings of experts and non-experts alike to share knowledge and learn about the latest advances and applications of spectroscopic ellipsometry and related techniques.  The meeting consists of a wide variety of tutorials, invited talks, presentations, and posters that cover all aspects of the field, and provides ample opportunities for networking and discussion.  The equipment display will cover the latest not only in ellipsometry but also in other methods of learning about surfaces, interfaces, thin films, nanostructures, and bulk materials under both static and dynamic conditions through the use of polarized light.

    The meeting will be held on the campus of the University of Colorado at Boulder.  The campus is in the foothills of the Rocky Mountains, and is about an hour away from the Denver Airport by public transportation.  Boulder is known for its blend of urban and outdoor activities, including a vibrant downtown and talented brewers and chefs.  The pedestrian Pearl Street Mall includes numerous art galleries, cafes, restaurants, and boutiques.  In addition to spectacular scenery, Boulder provides a wealth of recreational opportunities including biking and hiking.  The Rocky Mountain National Park is about 1 ½ hours away.

    Organizing Committee

    Mathias Schubert

    University of Nebraska-Lincoln (USA) & Lund University (Sweden)

    David E. Aspnes

    North Carolina State University (USA)

    Alain C. Diebold

    CNSE, University at Albany, SUNY (USA)

    Eva Franke-Schubert

    University of Nebraska-Lincoln (USA)


















Visitor Map

Visitor Map
  • Fourth Announcement

    Dear colleagues,

    The ICSE-10 official website is now online.

    Stay tuned for important updates about the abstract submission timeline, conference schedule, award nominations, and speaker invitations.

    At this time we anticipate ICSE-10 to be a fully in-person meeting.

    Please encourage your colleagues and collaborators interested in participating to subscribe to our website icse10.ellipsometry.us

    Please direct questions and inquiries to icse10@ellipsometry.us

    We look forward to welcoming you to Boulder, Colorado June 8-13 2025.

    The ICSE-10 organizers

  • Third Announcement

    We proudly announce the 10th International Conference on Spectroscopic Ellipsometry ICSE10 which will be held in Colorado, U.S.A., June 8-13, 2025. The main organizing team consists of Eva Schubert from the University of Nebraska-Lincoln, David Aspnes from North Carolina State University, Alain Diebold from University at Albany, SUNY  and Mathias Schubert also from Nebraska.

    ICSE is a conference series which was founded in 1993 and is held every three years to share new ideas related to ellipsometry applications such as materials characterization, real-time process analysis, and instrumentation development utilizing the polarization properties of electromagnetic waves in the spectral region from Terahertz to soft-X-ray wavelengths. The conference brings together an international cohort of experienced scientists and leaders of the community, as well as many graduate students, PostDoc’s, and other early career professionals.

    ICSE-10 is committed to the development of a collaborative, inclusive, diverse, and internationally conscious workforce, and is seeking opportunities to increase participation of a diverse and inclusive population of undergraduate and graduate students, but also PostDoc’s, and early career professionals.

    Please mark your calendars and stay tuned for further information. A website will be launched soon and abstract submission details will be provided.

    We look forward to welcoming you in Colorado in 2025!

    Eva Schubert, David Aspnes, Alain Diebold, and Mathias Schubert

  • Second Announcement

  • First Announcement

    Dear Spectroscopic Ellipsometry Community,

    We look forward to welcoming you to ICSE-10, which will be held 08-13 June 2025 at the Conference Center of the University of Colorado – Boulder. Boulder is located at the base of the foothills of the Rocky Mountains, less than a one-hour drive from the Denver Airport.

    ICSE-10 will follow the organization of previous ICSE conferences. Honorary, Advisory, Program, and Local Arrangements Committees will be formed over the next few months and tasked with specific responsibilities. Volunteers are gladly accepted.

    We will be sending you further informational Emails once the ICSE-10 Website has been established and more details become available.

    We look forward to seeing you there!

    Mathias Schubert (University of Nebraska, Lincoln)
    David Aspnes (North Carolina State University)
    Alain Diebold (CNSE, SUNY Polytechnic Institute)

  • Event Venue

    ICSE-10 will be held at the University of Colorado’s University Memorial Center (UMC) in Boulder, Colorado, USA. The main conference events and a simultaneous industry exhibition will take place in the Glenn Miller Ballroom and the adjacent Aspen Rooms.

Tentative Scope & Topics


  • Artificial Intelligence and Machine Learning
  • Data Analysis
  • Fast data processing
  • Optical Modeling (Finite Element, ab-initio, …)
  • Subwavelength Structure Analysis and Modeling
  • Time-dependence


  • Imaging Ellipsometry and High-Resolution
  • Metrology
  • Mueller-Matrix Spectroscopy
  • New Developments
  • Nonlinear and Time-Resolved Ellipsometry
  • THz and Extreme Ultraviolet


  • Advanced Semiconductor Metrology
  • Anisotropy and Anisotropic Materials
  • Artificial Intelligence and Machine Learning
  • Bio- and Life-Sciences
  • Correlated Systems
  • Chemistry and Biochemistry
  • Ferroelectrics, Piezoelectrics, Ferromagnetics, Antiferromagnetics, Multiferroics
  • High-Entropy Materials
  • Imaging
  • Interfaces
  • Liquid Crystals
  • Mueller-Matrix Polarimetry and Scatterometry
  • Nanomaterials
  • Optical Properties
  • Organics and Polymers
  • Photovoltaics and Renewable Energy Materials
  • Quantum Materials and Materials for Quantum Applications
  • Real-time Process Monitoring and Control
  • Two-Dimensional Systems
  • Awards

    ICSE-10 will introduce new student as well as life-time achievement awards. Students will indicate their interest upon registration and partake in the best oral presentation and best poster competitions. Life-time achievement awards will bring remembrance to early pioneers in the field and highlight the importance of historical developments.

    ICSE-10 will feature the following awards in recognition of excellent achievements at different levels:

    • Paul Drude Award

      The Paul Drude Award is traditionally the main recognition at the ICSE conference series, given to a young scientist for exceptional contributions to the development and application of spectroscopic ellipsometry.

    • Hans Mueller Memorial Award/Lecture

      The Hans Mueller Memorial Award/Lecture will be established at ICSE-10 to honor pioneering, lifetime achievements in the field of ellipsometry.

    • Innovation and Creativity Award

      The Innovation and Creativity Award will be given, also for the first time at ICSE-10, to recognize the best innovation and creativity in the field of ellipsometry.

    • Student Awards

      Student Awards, newly featured at ICSE-10, will be handed to graduate students for the best oral presentation and for the best poster.

  • Exhibitor Information

    ICSE-10 will feature an exhibition that runs from Monday to Thursday and offers a range of booth sizes in the Aspen Rooms near the main venue. Included amenities are tables, power access, WiFi, and security. Exhibit rates vary from Platinum to Bronze. Further sponsorship is encouraged through various events. Sponsors are greatly appreciated as a vital element to the community and the success of ICSE-10.

Logo of the Arbeitskreis Ellipsometrie (AKE) - Paul Drude e.V.