• Scope & Topics

    The Technical Program will cover all aspects in the fields of ellipsometry and polarimetry, or other applications that use polarization properties of light. The range of topics cover broad areas from Artificial Intelligence, Machine Learning, Biological, Chemical, Physical, and Material Sciences to Life Sciences as well as wide engineering developments and metrology applications.

    Tentative Scope & Topics


    • Artificial Intelligence and Machine Learning
    • Data Analysis
    • Fast data processing
    • Optical Modeling (Finite Element, ab-initio, …)
    • Subwavelength Structure Analysis and Modeling
    • Time-dependence


    • Imaging Ellipsometry and High-Resolution
    • Metrology
    • Mueller-Matrix Spectroscopy
    • New Developments
    • Nonlinear and Time-Resolved Ellipsometry
    • THz and Extreme Ultraviolet


    • Advanced Semiconductor Metrology
    • Anisotropy and Anisotropic Materials
    • Artificial Intelligence and Machine Learning
    • Bio- and Life-Sciences
    • Correlated Systems
    • Chemistry and Biochemistry
    • Ferroelectrics, Piezoelectrics, Ferromagnetics, Antiferromagnetics, Multiferroics
    • High-Entropy Materials
    • Imaging
    • Interfaces
    • Liquid Crystals
    • Mueller-Matrix Polarimetry and Scatterometry
    • Nanomaterials
    • Optical Properties
    • Organics and Polymers
    • Photovoltaics and Renewable Energy Materials
    • Quantum Materials and Materials for Quantum Applications
    • Real-time Process Monitoring and Control
    • Two-Dimensional Systems

    Special Events

  • Fourth Announcement

    Dear colleagues,

    The ICSE-10 official website is now online.

    Stay tuned for important updates about the abstract submission timeline, conference schedule, award nominations, and speaker invitations.

    At this time we anticipate ICSE-10 to be a fully in-person meeting.

    Please encourage your colleagues and collaborators interested in participating to subscribe to our website icse10.ellipsometry.us

    Please direct questions and inquiries to icse10@ellipsometry.us

    We look forward to welcoming you to Boulder, Colorado June 8-13 2025.

    The ICSE-10 organizers

  • Third Announcement

    We proudly announce the 10th International Conference on Spectroscopic Ellipsometry ICSE10 which will be held in Colorado, U.S.A., June 8-13, 2025. The main organizing team consists of Eva Schubert from the University of Nebraska-Lincoln, David Aspnes from North Carolina State University, Alain Diebold from University at Albany, SUNY  and Mathias Schubert also from Nebraska.

    ICSE is a conference series which was founded in 1993 and is held every three years to share new ideas related to ellipsometry applications such as materials characterization, real-time process analysis, and instrumentation development utilizing the polarization properties of electromagnetic waves in the spectral region from Terahertz to soft-X-ray wavelengths. The conference brings together an international cohort of experienced scientists and leaders of the community, as well as many graduate students, PostDoc’s, and other early career professionals.

    ICSE-10 is committed to the development of a collaborative, inclusive, diverse, and internationally conscious workforce, and is seeking opportunities to increase participation of a diverse and inclusive population of undergraduate and graduate students, but also PostDoc’s, and early career professionals.

    Please mark your calendars and stay tuned for further information. A website will be launched soon and abstract submission details will be provided.

    We look forward to welcoming you in Colorado in 2025!

    Eva Schubert, David Aspnes, Alain Diebold, and Mathias Schubert

  • Second Announcement

  • First Announcement

    Dear Spectroscopic Ellipsometry Community,

    We look forward to welcoming you to ICSE-10, which will be held 08-13 June 2025 at the Conference Center of the University of Colorado – Boulder. Boulder is located at the base of the foothills of the Rocky Mountains, less than a one-hour drive from the Denver Airport.

    ICSE-10 will follow the organization of previous ICSE conferences. Honorary, Advisory, Program, and Local Arrangements Committees will be formed over the next few months and tasked with specific responsibilities. Volunteers are gladly accepted.

    We will be sending you further informational Emails once the ICSE-10 Website has been established and more details become available.

    We look forward to seeing you there!

    Mathias Schubert (University of Nebraska, Lincoln)
    David Aspnes (North Carolina State University)
    Alain Diebold (CNSE, SUNY Polytechnic Institute)

Logo of the Platinum Sponsor: J.A. Woollam Co., Inc.
Logo of the Platinum Sponsor: University of Nebraska-Lincoln, Department of Electrical and Computer Engineering
Logo of the U.S. National Science Foundation
Logo of the Arbeitskreis Ellipsometrie (AKE) - Paul Drude e.V.