Sessions with presentations by Keynote & Invited Speakers will take place Monday, June 9, through Friday, June 13, 2025.
Keynote Speakers
University of Colorado Boulder (USA)
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Prof. Steven M. George is Professor in the Dept. of Chemistry and Biochemistry and Dept. of Mechanical Engineering at the University of Colorado at Boulder. Dr. George received his B.S. in Chemistry from Yale University (1977) and his Ph.D. in Chemistry from the University of California at Berkeley (1983). Dr. George has more than 400 publications in the areas of thin film growth and etching, surface science, and physical chemistry. In addition, he currently has 16 issued U.S. or PCT patents and 12 U.S. or PCT patent applications undergoing review. Dr. George’s research interests are in the areas of surface chemistry, thin film growth and etching and nanostructure engineering. He is directing a research effort focusing on atomic layer deposition (ALD), atomic layer etching (ALE) and molecular layer deposition (MLD). This research is examining new surface chemistry, measuring thin film growth and etching rates, characterizing the properties of films and developing new reactors for ALD, ALE and MLD. Dr. George chaired the first Topical Conference on Atomic Layer Deposition (ALD2001) in May 2001. He has been on the Conference Committees of all subsequent ALD meetings. Dr. George teaches a one-day short course on ALD for the American Vacuum Society (AVS). He also was President of AVS (2014). Dr. George has received a number of awards including the ALD Innovation Award from the AVS International Conference on Atomic Layer Deposition (2013) and an R&D 100 Award for Particle-ALD™ (2004). Dr. George is a Fellow of the AVS (2000) and the APS (1997). He is also a co-founder of ALD NanoSolutions, Inc., a company that is working to commercialize ALD technology.
Alain Diebold
University at Albany, SUNY (USA)
Mueller Matrix Spectroscopic Ellipsometry based Scatterometry: Optical Dimensional and Shape Analysis
Alain Diebold is Professor Emeritus and Empire Innovation Professor of Nanoscale Science in the College of Nanotechnology, Science and Engineering at the University at Albany, SUNY. Professor Diebold maintains an active, funded research program in the materials science of 2D materials and in the characterization and metrology of new semiconductor materials and structures. He is an AVS Fellow and a SPIE Fellow. Significant publications include a Fall 2021 book from Springer Nature entitled the Optical and Electrical Properties of Nanoscale Materials (co-author) and the Handbook of Silicon Semiconductor Metrology (editor and chapter author). Through collaboration with the industrial partners students and post-doctoral fellows have advanced the characterization and metrology of advanced materials and structures through Mueller Matix spectroscopic ellipsometry based scatterometry, microscopy, and both laboratory and synchrotron-based X-Ray methods.
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Shiyuan Liu
Huazhong University of Science and Technology (China)
Advanced Mueller Matrix Ellipsometry: Instrumentation and emerging applications
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Invited Speakers
Shirly Espinoza
ELI Beamlines (Czech Republic)
Approaching Ultrafast phenomena in materials by time-resolved ellipsometry
MyungJun Lee
Samsung (South Korea)
New Spectroscopic Ellipsometry Instrumentation for application to the semiconductor industry
Ufuk Kilic
University of Nebraska-Lincoln (USA)
Metamaterial Platforms: Harnessing Spectrally Controllable Strong Chiroptical Activity and Beyond
Viktor Rindert
Lund University (Sweden)
Exploring Paramagnetic Resonance through Mueller Matrix Ellipsometry
Peter Petrik
University of Debrecen (Hungary)
Low-dimensional, combinatorial and periodic structures for sensing catalysis — characterization of interface process by in-situ spectroscopic ellipsometry
Chris Sturm
Universitaet Leipzig (Germany)
Electromagnetic waves in optically anisotropic media: Presence and propagation of singular states
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