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Keynote & Invited Speakers

From Monday, June 9, through Friday, June 13, 2025, Oral and Poster Sessions will take place in the Glenn Miller Ballroom, including an excellent lineup of Keynote & Invited Speakers.
Please find the up-to-date Schedule of Events in the Abstract Book.

Keynote Speakers

University of Colorado Boulder (USA)

In-Situ Spectroscopic Ellipsometry Studies of Selective Atomic Layer Deposition and Etch Processes

Prof. Steven M. George is Professor in the Dept. of Chemistry and Biochemistry and Dept. of Mechanical Engineering at the University of Colorado at Boulder. Dr. George received his B.S. in Chemistry from Yale University (1977) and his Ph.D. in Chemistry from the University of California at Berkeley (1983). Dr. George has more than 400 publications in the areas of thin film growth and etching, surface science, and physical chemistry. In addition, he currently has 16 issued U.S. or PCT patents and 12 U.S. or PCT patent applications undergoing review. Dr. George’s research interests are in the areas of surface chemistry, thin film growth and etching and nanostructure engineering. He is directing a research effort focusing on atomic layer deposition (ALD), atomic layer etching (ALE) and molecular layer deposition (MLD). This research is examining new surface chemistry, measuring thin film growth and etching rates, characterizing the properties of films and developing new reactors for ALD, ALE and MLD. Dr. George chaired the first Topical Conference on Atomic Layer Deposition (ALD2001) in May 2001. He has been on the Conference Committees of all subsequent ALD meetings. Dr. George teaches a one-day short course on ALD for the American Vacuum Society (AVS). He also was President of AVS (2014). Dr. George has received a number of awards including the ALD Innovation Award from the AVS International Conference on Atomic Layer Deposition (2013) and an R&D 100 Award for Particle-ALD™ (2004). Dr. George is a Fellow of the AVS (2000) and the APS (1997). He is also a co-founder of ALD NanoSolutions, Inc., a company that is working to commercialize ALD technology.

University at Albany, SUNY (USA)

Mueller-Matrix Spectroscopic Ellipsometry based Scatterometry: Optical Dimensional and Shape Analysis

Alain Diebold is Professor Emeritus and Empire Innovation Professor of Nanoscale Science in the College of Nanotechnology, Science and Engineering at the University at Albany, SUNY. Professor Diebold maintains an active, funded research program in the materials science of 2D materials and in the characterization and metrology of new semiconductor materials and structures. He is an AVS Fellow and a SPIE Fellow. Significant publications include a Fall 2021 book from Springer Nature entitled the Optical and Electrical Properties of Nanoscale Materials (co-author) and the Handbook of Silicon Semiconductor Metrology (editor and chapter author). Through collaboration with the industrial partners students and post-doctoral fellows have advanced the characterization and metrology of advanced materials and structures through Mueller Matix spectroscopic ellipsometry based scatterometry, microscopy, and both laboratory and synchrotron-based X-Ray methods.

Huazhong University of Science and Technology (China)

Advanced Mueller-Matrix Ellipsometry: Instrumentation and Emerging Applications

Prof. Shiyuan Liu received his PhD in mechanical engineering from Huazhong University of Science and Technology (HUST), Wuhan, China in 1998, and worked as a visiting scholar at University of Manchester, Manchester, UK from 2000 to 2001. He is currently a professor of mechanical engineering and a professor of optical engineering at HUST. His research interests include computational imaging and computational lithography, micro/nano measurement technology and instrumentation, optical metrology and defect inspection for semiconductor manufacturing, etc. Prof. Liu has led the development of a series of advanced and novel Mueller matrix ellipsometers, including a broadband Mueller matrix ellipsometer covering the ultraviolet-visible-infrared (UV-VIS-IR) region, a submicron-lateral-resolved imaging Mueller matrix ellipsometer, and a microsecond time-resolved high-speed Mueller matrix ellipsometer. He holds more than 100 patents and has authored or co-authored more than 200 peer-reviewed journal papers. He was elected a Council Member of International Committee of Measurements and Instrumentation (ICMI) in 2015, and was awarded the National Science Funds for Distinguished Young Scholars by the National Natural Science Foundation of China (NSFC). He is also a founder of Wuhan Eoptics Inc., a company that is working to commercialize spectroscopic ellipsometers.

Lund University (Sweden) 

THz Spectroscopic Ellipsometry and Its Future

Vanya Darakchieva is Professor in Materials Science at Lund University. She holds a PhD from Linköping University (2004). Her background is in semiconductor physics with focus on developing (ultra)wide bandgap semiconductors for high-frequency and power electronics. She is also developing spectroscopic ellipsometry techniques for studying electronic transport in materials from bulk to the nanoscale. Her research interests include Terahertz Ellipsometry and optical Hall effect and she is currently developing Terahertz-Electron-Paramagnetic-Resonance-Ellipsometry. She has established and she is leading two interdisciplinary centers: i) VINNOVA Competence center for III-Nitride technology – C3NiT-Janzén and ii) Terahertz Materials Analysis Center.  Her research project portfolio (PI~30 MEuro) includes awards from EU Commission, Vinnova, VR, SSF, ERC, KAW etc. She authored/co-authored 190+ peer reviewed journal papers.

New Mexico State University (USA)

Accurate Measurements of Optical Constants using Temperature-Dependent Ellipsometry and Comparison with k.p Theory

Stefan Zollner received his BS in Physics from Universität Regensburg (Germany) in 1983 and his MS in physics (1987) and Ph.D. in physics (1991) from Universität Stuttgart (Germany) and the Max-Planck-Institute for Solid State Research. After a postdoctoral year at the IBM Research Division in Yorktown Heights, NY, and a five-year appointment at Iowa State University and the Ames Laboratory (US-DOE), he worked as a semiconductor engineer (Motorola, Freescale, IBM) for 15 years in metrology and process integration. Since 2010, he has been the Head of the Department of Physics at New Mexico State University in Las Cruces, NM. His research interests include precision measurements of temperature-dependent optical constants using spectroscopic ellipsometry and their interpretation to determine basic properties of solids, ultrafast processes in semiconductors using femtosecond pump-probe laser spectroscopy, and the development of novel materials for applications in microelectronics and optoelectronics. Dr. Zollner is a Fellow of the American Physical Society and the American Vacuum Society and an IEEE Senior Member. He is an author of about 200 peer-reviewed journal articles.

Yuxiang Zheng

Fudan University (China)

Half a Century of Spectroscopic Ellipsometry in China

Yuxiang Zheng received his B.E. and M.E. degrees in Microelectronics Technology at Xi’an Jiaotong University in 1990 and 1993, respectively. He earned his Ph.D. in Condensed Matter Physics at Fudan University in 1996. He began his academic career as a faculty member in the Department of Physics at Fudan University (1996–1999) before joining the School of Science and Engineering at Nihon University, Japan (1999–2001). During his time in Japan, he contributed to the Next-Generation Optical Storage Program, a large-scale national research initiative of Japan. Since May 2006, he has served as a professor in the Department of Optical Science and Engineering at Fudan University. His research focuses on optical and magneto-optical properties of solids, advanced spectroscopic techniques, the fabrication and characterization of optical thin films. He has published over 200 peer-reviewed journal articles and holds more than 20 granted patents. He has held several distinguished roles, including the Editor-in-Chief of Modern Optics, a nationally designated textbook for higher education in China, the Recipient of the Ministry of Education’s New Century Excellent Talents Program Award (2006), and the Recipient of the Shanghai Academic/Technology Research Leader Program Grant (2012). Since 2014, he has served as Vice Chairperson of the Shanghai Optical Society.


Invited Speakers

David Aspnes

North Carolina State University (USA)

Removing Noise from Spectra: The Next 100 Years.

Hans A. Bechtel

Lawrence Berkeley National Laboratory (USA)

Ultrabroadband infrared nanospectroscopy: From Near to Far

Shirly Espinoza

ELI Beamlines (Czech Republic)

Approaching Ultrafast Phenomena in Materials by Time-Resolved Ellipsometry

Thomas A. Germer

National Institute of Standards and Technology (USA)

EUV spectroscopic ellipsometry and scatterometry

Kurt Hingerl

Johannes Kepler University Linz (Austria)

Applied Spectroscopic Imaging Ellipsometry

Hiroyuki Fujiwara

Gifu University (Japan)

Highly Accurate Classification of Material Types from Spectroscopic Ellipsometry Heatmap Measurements Using Deep Learning

Ufuk Kilic

University of Nebraska-Lincoln (USA)

Metamaterial Platforms: Harnessing Spectrally Controllable Strong Chiroptical Activity and Beyond

Taeyong Jo

Samsung (South Korea)

New Spectroscopic Ellipsometry Instrumentation for Application to the Semiconductor Industry

Peter Petrik

University of Debrecen (Hungary)

Low-Dimensional, Combinatorial and Periodic Structures for Sensing Catalysis – Characterization of Interface Process by In-Situ Spectroscopic Ellipsometry

Angelo Pierangelo

Institut Polytechnique De Paris (France)

Fast, High-Resolution Integrated Multispectral Mueller Ellipsometry for In-Vivo Biomedical Diagnostics

Viktor Rindert

Lund University (Sweden)

Exploring Paramagnetic Resonance through Mueller-Matrix Ellipsometry

Chris Sturm

Universität Leipzig (Germany)

Electromagnetic Waves in Optically Anisotropic Media: Presence and Propagation of Singular States


Refreshments will be served during session breaks and during poster sessions. Lunch will be served Sunday through Thursday.

Logo of the Platinum Sponsor: University of Nebraska-Lincoln, Department of Electrical and Computer Engineering
Logo of the Arbeitskreis Ellipsometrie (AKE) - Paul Drude e.V.
  • Tenth Announcement

    With the countdown ticking down fast, only two and a half weeks remain until the 10th International Conference on Spectroscopic Ellipsometry (ICSE-10) will start on June 8, 2025, in Boulder, Colorado. We are pleased to announce that the Abstract Book is now online. Please make sure to Register before Thursday, May 22, 2025! Reservations for low-cost accommodation in Campus Lodging are still available until May 23, 2025.

    We are excited about our week-long program of Technical Sessions and Networking Events. We expect wonderful late Spring/early Summer weather, and the snow-capped 4,000 m peaks of the Continental Divide will provide for the most stunning backdrop of our meeting.

    Abstract Book

    The Abstract Book is now online in its preliminary version.

    Please find the placement of your contribution in the Schedule of Events, and inform the conference organizers immediately if your scheduled contribution needs to be changed. Please also double check that your abstract is displayed satisfactorily.

    Some changes to the Schedule of Events may occur as it is being finalized.

    Conference Registration

    Conference Registration for ICSE-10 is open until Thursday, May 22, 2025. Registration Fees are set at a rate of:

    • $900 for Regular attendees,
    • $500 for Student attendees, and
    • $300 for Accompanying Guests for Social Events.

    These Registration Fees include all activities of the Technical Program and Social Events at no extra costs to participants.

    Campus Lodging

    Please make your arrangements for travel and accommodation. Low-cost accommodation in Campus Lodging is still available until May 23, 2025.

    Check-in is Sunday, June 8; Check-out is Friday, June 13.
    Single Lodging/Dining Package: $594.81 incl. tax
    Double Lodging/Dining Package: $362.41 incl. tax
    including 5 nights (Sunday 6/8 – Thursday 6/12), 5 breakfasts (Monday 6/9 – Friday 6/13) served in student dining halls, 1 linen packet (incl. sheets, towels, pillow & pillowcase and blanket or bedspread; packet will be set on bed, and guests will need to make their own bed), and free use of facilities in recreation center on main campus.

    Add-on night(s)
    Participants can add on 1-2 nights on each side of their stay. No meals included.
    Single per night: $95.50 incl. tax
    Double per night: $49.02 incl. tax.

    Sponsorship Opportunities

    From Monday, June 9, through Thursday, June 12, 2025, ICSE-10 will feature a simultaneous Industry Exhibition. The exhibition will be located in the Aspen Rooms next to the Glenn Miller Ballroom at the main conference venue.

    Exhibitors may register at rates according to their choice of two different booth sizes offered:

    • Large booths are 20 x 10 ft2 and include two registration waivers at $5,000.
    • Small booths are 10 x 10 ft2 and include one registration waiver at $2,500.

    Tables with table cloths, chairs, electric power, WiFi, and security will be provided.

    ICSE-10 organizers and attendees are grateful for a growing List of Sponsors that make this event possible.

    The organizing Committees look forward to working with our sponsors and to seeing you in Boulder, Colorado, soon.

    Best regards,
    Mathias, Dave, Alain, Eva, and Markus

  • Ninth Announcement

    With the countdown ticking down, only 30 days remain until the 10th International Conference on Spectroscopic Ellipsometry (ICSE-10) will start on June 8, 2025, in Boulder, Colorado. The international ellipsometry community will convene for an exciting week of Technical Sessions and Networking Events. We strongly encourage all participants to Register Now and to reserve low-cost accommodation in Campus Lodging.

    Conference Registration

    Conference Registration for ICSE-10 is open. Registration Fees are set at a rate of:

    • $900 for Regular attendees,
    • $500 for Student attendees, and
    • $300 for Accompanying Guests for Social Events.

    These Registration Fees include all activities of the Technical Program and Social Events at no extra costs to participants.

    Campus Lodging

    Please make your arrangements for travel and accommodation. Low-cost accommodation in Campus Lodging is still available. Check-in is Sunday, June 8; Check-out is Friday, June 13.

    Single Lodging/Dining Package:  $594.81 incl. tax
    Double Lodging/Dining Package:  $362.41 incl. tax
    including 5 nights (Sunday 6/8 – Thursday 6/12), 5 breakfasts (Monday 6/9 – Friday 6/13) served in student dining halls, 1 linen packet (incl. sheets, towels, pillow & pillowcase and blanket or bedspread; packet will be set on bed, and guests will need to make their own bed), and free use of facilities in recreation center on main campus.

    Add-on night(s)
    Participants can add on 1-2 nights on each side of their stay.  No meals included.
    Single per night: $95.50 incl. tax
    Double per night: $49.02 incl. tax.

    Sponsorship Opportunities

    From Monday, June 9, through Thursday, June 12, 2025, ICSE-10 will feature a simultaneous Industry Exhibition. The exhibition will be located in the Aspen Rooms next to the Glenn Miller Ballroom at the main conference venue.

    Exhibitors may register at rates according to their choice of two different booth sizes offered:

    • Large booths are 20 x 10 ft2 and include two registration waivers at $5,000.
    • Small booths are 10 x 10 ft2 and include one registration waiver at $2,500.

    Tables with table cloths, chairs, electric power, WiFi, and security will be provided.

    ICSE-10 organizers and attendees are grateful for a growing List of Sponsors that make this event possible.

    The organizing Committees look forward to working with our sponsors and to seeing you in Boulder, Colorado, soon.