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10th International Conference on Spectroscopic Ellipsometry

June 8-13, 2025, in Boulder, CO, USA

Diamond Sponsors

Logo of the U.S. National Science Foundation
Logo of the Platinum Sponsor: J.A. Woollam Co., Inc.

Latest Announcements

  • Eleventh Announcement

    With less than one day remaining on the countdown, we are excited to open the 10th International Conference on Spectroscopic Ellipsometry (ICSE-10) this Sunday, June 8, 2025, at the University of Colorado Boulder’s University Memorial Center (UMC).

    We are pleased to announce that ICSE-10 will now feature an option to view conference presentations online remotely. Please Register for Online Viewing Only to obtain access instructions in a follow-up email!

    Please also check the latest version of the Program Schedule & Abstract Book.

    Event Venue

    ICSE-10 will be held at the University of Colorado’s University Memorial Center (UMC). The main conference events such as tutorials, oral presentations, and poster sessions will take place in the Glenn Miller Ballroom. A simultaneous Industry Exhibition will take place in the East wing of the Glenn Miller Ballroom and in the adjacent Aspen Room.

    Please check the ICSE-10 website for information about directions, parking, and Wireless Internet (Wi-Fi) Access.

    Conference Registration

    Conference Registration for ICSE-10 is still open until June 13, 2025.
    Registration Fees are set at a rate of:

    • $900 for Regular attendees,
    • $500 for Student attendees, and
    • $300 for Accompanying Guests for Social Events.
    • $125 for Online Viewing Only (access instructions via follow-up email)

    The Registration Fees for Regular and Student attendees include all activities of the Technical Program and Social Events at no extra cost to participants.

    Please register on the ICSE-10 Online Registration website now!

    Program Schedule & Abstract Book

    The latest up-to-date version of the Program Schedule & Abstract Book is online.

    Please find the placement of your contribution in the Schedule of Events.
    Please also double check that your abstract is displayed satisfactorily.

    Oral Presenter Guidelines

    Please prepare your talks according to the following time allocations:

    • Tutorials: 50 min + 10 min Questions & Answers;
    • Keynotes: 25 min + 5 min Q&A;
    • Invited Talks: 17 min + 3 min Q&A;
    • Contributed Talks: 12 min + 3 min Q&A.

    Please note that session chairs will keep these time limits absolutely sharp!

    IMPORTANT: All oral presenters must upload their presentation file to the following MS SharePoint page no later than the evening before their scheduled presentation day! If a scheduled oral presentation file is not uploaded in time, it may be replaced by a standby presentation. We are thankful to our standby presenters for being available throughout the week.
    We kindly ask to rename Power Point or PDF presentation files “Abstract#-LastName-First-Name” before uploading.

    Upload “Abstract#-LastName-First-Name” Presentation File

    Poster Presenter Guidelines

    Poster boards are upright with dimensions of 4 feet wide by 8 feet high. One poster is associated with one poster board. The usable area in each poster board is 4 feet by 7 feet. You may prepare your poster in any form or shape as desired fitting within the usable area.

    Posters for Session I should be displayed by Monday morning and removed before the Excursion on Tuesday afternoon.
    Posters for Session II should be displayed by Wednesday at noon and removed before the Award Ceremony on Friday morning.

    Industry Exhibition

    From Monday, June 9, through Thursday, June 12, 2025, ICSE-10 will feature a simultaneous Industry Exhibition. The exhibition will be located in the East wing of the Glenn Miller Ballroom and the adjacent Aspen Room at the conference venue.

    ICSE-10 organizers and attendees are grateful for all the Sponsors that make this event possible.

    The organizing Committees look forward to seeing you in Boulder, Colorado, or online soon.

    Best regards,
    Mathias, Dave, Alain, Eva, and Markus

  • Tenth Announcement

    With the countdown ticking down fast, only two and a half weeks remain until the 10th International Conference on Spectroscopic Ellipsometry (ICSE-10) will start on June 8, 2025, in Boulder, Colorado. We are pleased to announce that the Abstract Book is now online. Please make sure to Register before Thursday, May 22, 2025! Reservations for low-cost accommodation in Campus Lodging are still available until May 23, 2025.

    We are excited about our week-long program of Technical Sessions and Networking Events. We expect wonderful late Spring/early Summer weather, and the snow-capped 4,000 m peaks of the Continental Divide will provide for the most stunning backdrop of our meeting.

    Abstract Book

    The Abstract Book is now online in its preliminary version.

    Please find the placement of your contribution in the Schedule of Events, and inform the conference organizers immediately if your scheduled contribution needs to be changed. Please also double check that your abstract is displayed satisfactorily.

    Some changes to the Schedule of Events may occur as it is being finalized.

    Conference Registration

    Conference Registration for ICSE-10 is open until Thursday, May 22, 2025. Registration Fees are set at a rate of:

    • $900 for Regular attendees,
    • $500 for Student attendees, and
    • $300 for Accompanying Guests for Social Events.

    These Registration Fees include all activities of the Technical Program and Social Events at no extra costs to participants.

    Please register on the ICSE-10 Online Registration website now!

    Campus Lodging

    Please make your arrangements for travel and accommodation. Low-cost accommodation in Campus Lodging is still available until May 23, 2025.

    Check-in is Sunday, June 8; Check-out is Friday, June 13.
    Single Lodging/Dining Package: $594.81 incl. tax
    Double Lodging/Dining Package: $362.41 incl. tax
    including 5 nights (Sunday 6/8 – Thursday 6/12), 5 breakfasts (Monday 6/9 – Friday 6/13) served in student dining halls, 1 linen packet (incl. sheets, towels, pillow & pillowcase and blanket or bedspread; packet will be set on bed, and guests will need to make their own bed), and free use of facilities in recreation center on main campus.

    Add-on night(s)
    Participants can add on 1-2 nights on each side of their stay. No meals included.
    Single per night: $95.50 incl. tax
    Double per night: $49.02 incl. tax.

    Please reserve and pay on the Campus Lodging Reservation website now!

    Sponsorship Opportunities

    From Monday, June 9, through Thursday, June 12, 2025, ICSE-10 will feature a simultaneous Industry Exhibition. The exhibition will be located in the Aspen Rooms next to the Glenn Miller Ballroom at the main conference venue.

    Exhibitors may register at rates according to their choice of two different booth sizes offered:

    • Large booths are 20 x 10 ft2 and include two registration waivers at $5,000.
    • Small booths are 10 x 10 ft2 and include one registration waiver at $2,500.

    Tables with table cloths, chairs, electric power, WiFi, and security will be provided.

    Please contact Eva Schubert for booth reservations ASAP!

    ICSE-10 organizers and attendees are grateful for a growing List of Sponsors that make this event possible.

    Please refer to the Prospectus for detailed information about sponsorship opportunities.

    The organizing Committees look forward to working with our sponsors and to seeing you in Boulder, Colorado, soon.

    Best regards,
    Mathias, Dave, Alain, Eva, and Markus

  • Ninth Announcement

    With the countdown ticking down, only 30 days remain until the 10th International Conference on Spectroscopic Ellipsometry (ICSE-10) will start on June 8, 2025, in Boulder, Colorado. The international ellipsometry community will convene for an exciting week of Technical Sessions and Networking Events. We strongly encourage all participants to Register Now and to reserve low-cost accommodation in Campus Lodging.

    Conference Registration

    Conference Registration for ICSE-10 is open. Registration Fees are set at a rate of:

    • $900 for Regular attendees,
    • $500 for Student attendees, and
    • $300 for Accompanying Guests for Social Events.

    These Registration Fees include all activities of the Technical Program and Social Events at no extra costs to participants.

    Please register on the ICSE-10 Online Registration website now!

    Campus Lodging

    Please make your arrangements for travel and accommodation. Low-cost accommodation in Campus Lodging is still available. Check-in is Sunday, June 8; Check-out is Friday, June 13.

    Single Lodging/Dining Package:  $594.81 incl. tax
    Double Lodging/Dining Package:  $362.41 incl. tax
    including 5 nights (Sunday 6/8 – Thursday 6/12), 5 breakfasts (Monday 6/9 – Friday 6/13) served in student dining halls, 1 linen packet (incl. sheets, towels, pillow & pillowcase and blanket or bedspread; packet will be set on bed, and guests will need to make their own bed), and free use of facilities in recreation center on main campus.

    Add-on night(s)
    Participants can add on 1-2 nights on each side of their stay.  No meals included.
    Single per night: $95.50 incl. tax
    Double per night: $49.02 incl. tax.

    Please reserve and pay on the Campus Lodging Reservation website now!

    Sponsorship Opportunities

    From Monday, June 9, through Thursday, June 12, 2025, ICSE-10 will feature a simultaneous Industry Exhibition. The exhibition will be located in the Aspen Rooms next to the Glenn Miller Ballroom at the main conference venue.

    Exhibitors may register at rates according to their choice of two different booth sizes offered:

    • Large booths are 20 x 10 ft2 and include two registration waivers at $5,000.
    • Small booths are 10 x 10 ft2 and include one registration waiver at $2,500.

    Tables with table cloths, chairs, electric power, WiFi, and security will be provided.

    Please contact Eva Schubert for booth reservations ASAP!

    ICSE-10 organizers and attendees are grateful for a growing List of Sponsors that make this event possible.

    Please refer to the Prospectus for detailed information about sponsorship opportunities.

    The organizing Committees look forward to working with our sponsors and to seeing you in Boulder, Colorado, soon.

  • Eighth Announcement

    Awards

    On Friday, June 13, 2025, the Awards ceremony will recognize excellent achievements at different levels by honoring

    • with the Hans Mueller Memorial Award and Lecture, sponsored by AIP Publishing and J.A. Woollam Co., Inc., respectively, shared in equal halves:
      Prof. Dr. John A. Woollam, Founder and CEO of J.A. Woollam Co., Inc. and Professor of Electrical and Computer Engineering at the University of Nebaska-Lincoln (USA), for having made pioneering, life-long contributions to the development, application, dissemination, and education in the field of spectroscopic ellipsometry; and
      Prof. Dr. David E. Aspnes, Distinguished University Professor Emeritus of Physics at North Carolina State University (USA), for development of fundamental theories of the linear and nonlinear optical properties of materials and thin films, and for pioneering the field of spectroscopic ellipsometry.
    • with the Paul Drude Award, sponsored by AIP Publishing:
      Dr. Ufuk Kiliç, Research Associate Professor at the University of Nebraska-Lincoln (USA), for the achievement of having demonstrated and determined unambiguous structural and optical relationships for chiral and achiral nanostructured metamaterials using computational engineering, nanostructure material preparation, and spectroscopic ellipsometry.
    • with the Innovation and Creativity Award, sponsored by Cryogenic US LLC:
      Dr. Shirly Espinoza, Scientist at ELI Beamlines. The Extreme Light Infrastructure ERIC. Dolní Břežany (Czech Republic), for developing the first versatile UV-NIR femtosecond pump-probe spectroscopic ellipsometer and for training, educating, and leading a broad and diverse international user community.
    • with Student Awards for the best oral presentation and for the best poster, sponsored by Semilab Inc. and Park Systems Corporation:
      Undergraduate and graduate students to be determined based on evaluations during the conference.

    ICSE-11 Proposal Solicitation

    The ICSE-10 organizers solicit proposals for the organization of ICSE-11. Please discuss with your colleagues and within your communities. ICSE meetings are corner stones in the history, presence, and future of the ellipsometry community. We seek strong teams for hosting ICSE-11 in 2028. Please send your short proposal to icse10@ellipsometry.us and /cc mschubert4@unl.edu. Please indicate the proposed main organizing team, location, and any further information you wish to provide.

    If more than one proposal should reach us, we will hold a presentation review meeting during ICSE-10 in Boulder. In this case, we will provide further instruction for your team’s presentation. We aim to have a decision for ICSE-11 ready by the end of ICSE-10 to announce to our community before the closing remarks.

    Conference Registration

    Conference Registration for ICSE-10 is open. Registration Fees are set at a rate of:

    • $900 for Regular attendees,
    • $500 for Student attendees, and
    • $300 for Accompanying Guests for Social Events.

    These Registration Fees include all activities of the Technical Program and Social Events at no extra costs to participants.

    Please register on the ICSE-10 Online Registration website before May 22, 2025!

    Sponsorship Opportunities

    From Monday, June 9, through Thursday, June 12, 2025, ICSE-10 will feature a simultaneous Industry Exhibition. The exhibition will be located in the Aspen Rooms next to the Glenn Miller Ballroom at the main conference venue.

    Exhibitors may register at rates according to their choice of two different booth sizes offered:

    • Large booths are 20 x 10 ft2 and include two registration waivers at $5,000.
    • Small booths are 10 x 10 ft2 and include one registration waiver at $2,500.

    Tables with table cloths, chairs, electric power, WiFi, and security will be provided.

    Please contact Eva Schubert for booth reservations.

    ICSE-10 organizers and attendees are grateful for a growing List of Sponsors that make this event possible.

    Please refer to the Prospectus for detailed information about sponsorship opportunities.

    The organizing Committees look forward to working with our sponsors and to seeing you in Boulder, Colorado, soon!

  • Seventh Announcement

    The international community of ellipsometry enthusiasts is set to meet at the 10th International Conference on Spectroscopic Ellipsometry (ICSE-10), scheduled for June 8-13, 2025, in Boulder, Colorado. This premier event serves as a platform for the

    • exchange of scientific and technological knowledge and recent advancements.
    • collaboration among professionals from academia, government, and industry.
    • development of an inclusive workforce for the future.

    ICSE-10 brings together a diverse group of experienced scientists and leaders, early career professionals, postdocs, plus graduate and undergraduate students—all in a breathtaking surrounding at the foothills of the Rocky Mountains.

    Conference Registration for the ICSE-10 is now open. Registration Fees are set at a rate of:

    • $900 for Regular attendees,
    • $500 for Student attendees, and
    • $300 for Accompanying Guests for Social Events.

    These Registration Fees include all activities of the Technical Program and Social Events at no extra costs to participants.

    Please register on the ICSE-10 Online Registration website before May 22, 2025!

    Please make your arrangements for travel and accommodation as soon as possible! Consider housing options around Boulder area and commute using Lyft/Uber/Taxi or by car. If traveling by car, use the Park-N-Ride places to park your car and access the conference site. A block of reduced rates in Hotels has been negotiated. A block of low-cost beds in Campus Lodging is available to all attendees until booked full.

    Please reserve and pay on the Campus Lodging Reservation website before May 23, 2025!

    From Monday, June 9, through Thursday, June 12, 2025, ICSE-10 will feature a simultaneous Industry Exhibition. The exhibition will be located in the Aspen Rooms next to the Glenn Miller Ballroom at the main conference venue.

    Exhibitors may register at rates according to their choice of two different booth sizes offered:

    • Large booths are 20 x 10 ft2 and include two registration waivers at $5,000.
    • Small booths are 10 x 10 ft2 and include one registration waiver at $2,500.

    Tables with table cloths, chairs, electric power, WiFi, and security will be provided.

    Please contact Eva Schubert for booth reservations.

    ICSE-10 organizers and attendees are grateful for a growing List of Sponsors that make this event possible.

    Please refer to the Prospectus for detailed information about sponsorship opportunities.

    The organizing Committees look forward to working with our sponsors and to seeing you in Boulder, Colorado, soon!

  • Sixth Announcement

    ICSE-10 Online Registration

    Registration for the upcoming 10th International Conference on Spectroscopic Ellipsometry (ICSE-10) is now open.

    Registration Fees are set at a rate of

    • $900 for Regular attendees,
    • $500 for Student attendees, and
    • $300 for Accompanying Guests for Social Events.

    These Fees include all activities of the Technical Program and Social Events at no extra costs to participants.

    Please register on the ICSE-10 Online Registration website before May 22, 2025!

    Online Registration

    Late Breaking Abstracts

    The Program Committee is currently reviewing submitted abstracts. Authors will be informed about their abstract’s acceptance or rejection as soon as possible. Abstracts will be included in an Abstract Booklet to be published on the conference website soon.

    Meanwhile, the Abstract Submission system remains open for Late Breaking Abstracts until April 1, 2025.

    Please encourage your senior, early-career, and student peers to Submit an Abstract now!

    Abstract Submission

    Sponsorship Opportunities

    ICSE-10’s comprehensive Technical Program and outstanding Social Events are a must-attend for every ellipsometry enthusiast across theory, instrumentation, and applications alike. Organizers and attendees are grateful for a growing List of Sponsors that make this event possible.

    Please refer to the Prospectus for sponsorship opportunities.

    Please stay tuned for further information regarding discounted Hotel or low-cost Campus Lodging, Attendance Support, and Presenter Guidelines, which will be provided soon.

    With kind regards,
    Mathias Schubert, University of Nebraska-Lincoln (USA) & Lund University (Sweden)
    David E. Aspnes, North Carolina State University (USA)
    Alain C. Diebold, CNSE, University at Albany, SUNY (USA)
    Eva Franke-Schubert, University of Nebraska-Lincoln (USA)
    Markus Raschke, University of Colorado at Boulder (USA)

  • Fifth Announcement

    The international community of ellipsometry enthusiasts is set to meet at the 10th International Conference on Spectroscopic Ellipsometry (ICSE-10), scheduled for June 8-13, 2025, in Boulder, Colorado. This premier event serves as a platform for the

    • exchange of scientific and technological knowledge and recent advancements.
    • collaboration among professionals from academia, government, and industry.
    • development of an inclusive workforce for the future.

    ICSE-10 brings together a diverse group of experienced scientists and leaders, early career professionals, postdocs, plus graduate and undergraduate students—all in a breathtaking surrounding at the foothills of the Rocky Mountains.

    As Conference Registration is fast approaching, registration fees are currently anticipated at a rate of $900 for regular and $500 for student attendees, including all activities at no extra costs to participants. Please start preparing your arrangements for travel and accommodation. A block of reduced rates in Hotels is currently being negotiated. A budget of low-cost beds in Campus Lodging may subsidize selected early-career and student attendees.

    The comprehensive Technical Program will include a broad range of aspects in the field of ellipsometry and polarimetry, as well as related applications utilizing the polarization properties of light. Topics cover theory, instrumentation, and applications across physics, chemistry, material science, and life sciences, as well as engineering and metrology.

    Sunday, complimentary Tutorials will kick-off ICSE-10 with outstanding scientists teaching introductory and advanced aspects in emerging areas:

    Tatiana Novikova (Tutorial):
    Imaging Mueller Polarimetry: From Metrology to Biomedicine

    Mathias Schubert (Tutorial):
    The Eigenpolarization Model: A Physics Approach to Render the Susceptibility Tensors of Anisotropic Materials

    Nikolas Podraza (Tutorial):
    Data Analysis: Turning Bad Models into Good Results

    Erwin Kessels (Tutorial):
    In-Situ Spectroscopic Ellipsometry during Atomic Layer Deposition and Related Processes

    Frank Urban (Tutorial):
    Artificial Intelligence and Machine Learning in Ellipsometry

    An Evening Reception will welcome our community from around the world in the warm atmosphere of the historic Chautauqua Dining Hall at the base of Boulder’s iconic Flatirons.

    Monday through Friday, Oral and Poster Sessions will take place in the Glenn Miller Ballroom, including an excellent lineup of Keynote & Invited Speakers:

    Steven M. George (Keynote):
    In-Situ Spectroscopic Ellipsometry Studies of Selective Atomic Layer Deposition and Etch Processes

    Alain Diebold (Keynote):
    Mueller-Matrix Spectroscopic Ellipsometry based Scatterometry: Optical Dimensional and Shape Analysis

    Yu-Xiang Zheng (Keynote):
    Half a Century of Spectroscopic Ellipsometry in China

    Shiyuan Liu (Keynote):
    Advanced Mueller-Matrix Ellipsometry: Instrumentation and Emerging Applications

    Vanya Darakchieva (Keynote):
    THz Spectroscopic Ellipsometry and Its Future

    Stefan Zollner (Keynote):
    Accurate Measurements of Optical Constants using Temperature-Dependent Ellipsometry and Comparison with k.p Theory

    David Aspnes (Invited):
    Removing Noise from Spectra: The Next 100 Years.

    Shirly Espinoza (Invited):
    Approaching Ultrafast Phenomena in Materials by Time-Resolved Ellipsometry

    Kurt Hingerl (Invited):
    Can Imaging Ellipsometry Beat the Diffraction Limit?

    Ufuk Kilic (Invited):
    Metamaterial Platforms: Harnessing Spectrally Controllable Strong Chiroptical Activity and Beyond

    Taeyong Jo (Invited):
    New Spectroscopic Ellipsometry Instrumentation for Application to the Semiconductor Industry

    Peter Petrik (Invited):
    Low-Dimensional, Combinatorial and Periodic Structures for Sensing Catalysis – Characterization of Interface Process by In-Situ Spectroscopic Ellipsometry

    Angelo Pierangelo (Invited):
    Fast, High-Resolution Integrated Multispectral Mueller Ellipsometry for In-Vivo Biomedical Diagnostics

    Viktor Rindert (Invited):
    Exploring Paramagnetic Resonance through Mueller-Matrix Ellipsometry

    Chris Sturm (Invited):
    Electromagnetic Waves in Optically Anisotropic Media: Presence and Propagation of Singular States

    A special session will be dedicated to aspects of Workforce Development for early-career professionals and students alike:

    Andy Antonelli (Keynote):
    Have Polarizer – Will Travel: The Need for Ellipsometry Expertise in Industry

    Shari Liss (Keynote):
    Workforce Development for Semiconductor Industry

    Refreshments will be served during session breaks and during poster sessions. Lunch will be served Sunday through Thursday.

    Please remember to Submit Your Abstract by 11:59 PM Mountain Time on January 31, 2025.

    Wednesday, an Excursion to the Georgetown Loop Railroad will bring all attendees aboard an original 19th-century train steaming along old gold miners tracks and leaving fond memories for a lifetime. Afterwards, the Conference Dinner will offer an authentic American experience in the Byron R. White Club with spectacular views over Folsom Field, the home stadium of the Colorado Buffaloes football team.

    On Friday, the Awards ceremony will honor

    • a young scientist for exceptional contributions with the Paul Drude Award.
    • a senior community member for pioneering, lifetime achievements with the Hans Mueller Memorial Award and Lecture.
    • an individual, research group, company, or institution for outstanding innovation and creativity with the Innovation and Creativity Award.
    • students for the best oral presentation and the best poster with respective Student Awards.

    Please remember to Submit Award Nominations no later than February 1, 2025.

    ICSE-10 will also feature a simultaneous, week-long Industry Exhibition in the Aspen Rooms next to the main venue. The organizers and attendees are grateful for a growing List of Sponsors that make this event possible.

    Please refer to the Prospectus for sponsorship opportunities.

    The organizing Committees look forward to seeing you in Boulder, Colorado, soon!

  • Fourth Announcement

    Dear colleagues,

    The ICSE-10 official website is now online.

    Stay tuned for important updates about the abstract submission timeline, conference schedule, award nominations, and speaker invitations.

    At this time we anticipate ICSE-10 to be a fully in-person meeting.

    Please encourage your colleagues and collaborators interested in participating to subscribe to our website icse10.ellipsometry.us

    Please direct questions and inquiries to icse10@ellipsometry.us

    We look forward to welcoming you to Boulder, Colorado June 8-13 2025.

    The ICSE-10 organizers

  • Third Announcement

    We proudly announce the 10th International Conference on Spectroscopic Ellipsometry ICSE10 which will be held in Colorado, U.S.A., June 8-13, 2025. The main organizing team consists of Eva Schubert from the University of Nebraska-Lincoln, David Aspnes from North Carolina State University, Alain Diebold from University at Albany, SUNY  and Mathias Schubert also from Nebraska.

    ICSE is a conference series which was founded in 1993 and is held every three years to share new ideas related to ellipsometry applications such as materials characterization, real-time process analysis, and instrumentation development utilizing the polarization properties of electromagnetic waves in the spectral region from Terahertz to soft-X-ray wavelengths. The conference brings together an international cohort of experienced scientists and leaders of the community, as well as many graduate students, PostDoc’s, and other early career professionals.

    ICSE-10 is committed to the development of a collaborative, inclusive, diverse, and internationally conscious workforce, and is seeking opportunities to increase participation of a diverse and inclusive population of undergraduate and graduate students, but also PostDoc’s, and early career professionals.

    Please mark your calendars and stay tuned for further information. A website will be launched soon and abstract submission details will be provided.

    We look forward to welcoming you in Colorado in 2025!

    Eva Schubert, David Aspnes, Alain Diebold, and Mathias Schubert

  • Second Announcement

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Gold Sponsors

Bronze Sponsors

Logo of the Platinum Sponsor: University of Nebraska-Lincoln, Department of Electrical and Computer Engineering

Friends of ICSE-10

Logo of the Arbeitskreis Ellipsometrie (AKE) - Paul Drude e.V.

Important Dates